| 摘要 |
PURPOSE: A laser cutting device capable of regulating beam shape and energy distribution is provided to set the optimum shape and energy distribution of a laser beam projected to a substrate without changing an optical system in case of changes in the material, thickness, cut line shape, processing speed, and cut surface quality of the substrate. CONSTITUTION: A laser cutting device capable of regulating beam shape and energy distribution comprises a laser source(100) which generates a laser beam providing thermal energy to a substrate(10), a scanner unit(400) which forms a laser beam corresponding to predetermined sectional shape and energy distribution of a laser beam and projects the laser beam to the substrate, a cooling unit(500) which sprays cooling fluid along a predetermined cut line of the substrate, a micro-crack generating unit(600) which forms micro-cracks on the substrate, and a stage(700) which supports the substrate and moves the substrate in x- and y-axes. [Reference numerals] (100) Laser source; (200) Beam output regulating unit |
