发明名称 |
SUBSTRATE TRANSFER UNIT AND INSPECTING APPARATUS USING THE SAME |
摘要 |
PURPOSE: A substrate transportation unit and a substrate inspection device using the same are provided to improve accuracy of substrate inspection by minimizing vibration of a substrate generated by a transferring roller. CONSTITUTION: A substrate transportation unit(110) comprises a rotary shaft(112) and a transferring roller(113). A rotary shaft is installed to a frame and a top check module(130) which can be rotated. The transferring roller is installed to the rotary shaft at constant intervals and is contacted to a substrate. A driving source(124) and a power transmission means(125) transfers torque to the rotary shaft. The top check module comprises a top inspection camera(131) and a top review camera(132). The top inspection camera is installed at a camera support stand(133). The top review camera precisely inspects a defect doubt region of the upper side of the substrate. |
申请公布号 |
KR101311852(B1) |
申请公布日期 |
2013.09.27 |
申请号 |
KR20100125031 |
申请日期 |
2010.12.08 |
申请人 |
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发明人 |
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分类号 |
B65G49/06;B65G51/03;G02F1/13;H01L21/677 |
主分类号 |
B65G49/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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