发明名称 FIELD EFFECT TRANSISTOR AND METHOD FOR FABRICATING THE SAME
摘要 <p>PURPOSE: A field effect transistor and a forming method thereof are provided to fill a gap area by arranging a gate electrode pattern on a semiconductor layer. CONSTITUTION: A fin part protrudes from a substrate. A device isolation film covers the lower sidewall of the fin part. A semiconductor layer (130) is formed on the upper sidewall and the upper surface of the fin part. A gap area is formed between the upper surface of the device isolation film and the lower surface of the semiconductor layer. A gate electrode pattern is formed on the semiconductor layer.</p>
申请公布号 KR20130106093(A) 申请公布日期 2013.09.27
申请号 KR20120027737 申请日期 2012.03.19
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 OH, CHANG WOO;LEE, SANG HOON;KIM, SUNG BONG;LEE, HYUNG SUK
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
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