FIELD EFFECT TRANSISTOR AND METHOD FOR FABRICATING THE SAME
摘要
<p>PURPOSE: A field effect transistor and a forming method thereof are provided to fill a gap area by arranging a gate electrode pattern on a semiconductor layer. CONSTITUTION: A fin part protrudes from a substrate. A device isolation film covers the lower sidewall of the fin part. A semiconductor layer (130) is formed on the upper sidewall and the upper surface of the fin part. A gap area is formed between the upper surface of the device isolation film and the lower surface of the semiconductor layer. A gate electrode pattern is formed on the semiconductor layer.</p>
申请公布号
KR20130106093(A)
申请公布日期
2013.09.27
申请号
KR20120027737
申请日期
2012.03.19
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
OH, CHANG WOO;LEE, SANG HOON;KIM, SUNG BONG;LEE, HYUNG SUK