HYDROGEN SENSOR AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A hydrogen sensor and a hydrogen sensor manufacturing method are provided to have no special limitations on a material of a substrate and to produce the hydrogen sensor having nanogaps according to a use. CONSTITUTION: A hydrogen sensor manufacturing method includes the following steps of: preparing a mold(20) having hydrogen sensing unit patterns(24) and nanogap patterns(26) desired to form on a substrate and a base(22); preparing a material capable of transferring the patterns of the mold; transferring the patterns of the mold on the material by making the mold touch the material; and forming the substrate having the patterns by removing the mold from the substrate. The substrate of a hydrogen sensor(10) includes a base unit(122), a plurality of hydrogen sensing units(126), and a plurality of nanogaps(124). A thin film(110) of transition metal or an alloy expandable by hydrogen is formed on the substrate. [Reference numerals] (AA) Substrate material S