| 摘要 |
<p>The method involves storing a raw signal corresponding to the laser telemeter measurement of the level variation on a line of points traversing a wafer (300) of a stack (30) of elements (31). The raw signal is analysed to estimate parameters relative to the structure of the stack. The stored raw signal is processed by statistical processing based on the estimated parameters. The processed signal is analysed to determine the number of stacked elements, where the parameters are average thickness of the elements of the stack, and dispersion factor of the thickness of the elements of the stack. An independent claim is also included for a device for counting stacked elements.</p> |
