| 摘要 |
PURPOSE: A protection system using a magnet is provided to improve yield by removing fine particles with contactless locking or unlocking operations. CONSTITUTION: A door frame (1000) includes a pair of frame bodies (1100,1200) and a blocking member (1300) which connects the frame bodies. A plurality of driving assemblies (2000) are installed on both sides of the door frame. The driving assemblies include fixed members (2121,2221) with first magnets and movable members (2141,2241) with second magnets. Each first electrode of the first magnets is opposite to each first electrode of the second magnets. A safety element (3000) is combined with the fixed members and the movable members. |
