CONTACTOR DEVICE FOR SPLIT TYPE SEMICONDUCTOR DEVICE OF LARGE AREA

摘要

PURPOSE: A large sized division type semiconductor device contactor apparatus is provided to reduce a path which moves a contactor to the test site outside. CONSTITUTION: A contactor unit (100) divides a contactor and successively connects to a test site. A contactor driving unit (200) drives the intersection of the contactor which is installed on the top of the contactor unit and is divided. A shuttle unit (300) supplies a semiconductor device to the divided contactor in order to perform loading and unloading at the same time and discharges a device on which a test is finished. A shuttle cam block unit (400) is installed on the top of the shuttle unit and changes a pitch of the shuttle unit. The contactor driving unit drives the contactor of one group and electrically contacts the semiconductor device to a test site. The contactor driving unit drives the contactor of the other group and grasps a device to be tasted by putting the tested semiconductor device on the shuttle unit. [Reference numerals] (500) Contactor torque sensing unit