| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing device for reducing dust in a reaction tube.SOLUTION: The semiconductor manufacturing device of an embodiment includes: a reaction tube; a gas supply pipe connected to the reaction tube to supply gas into the reaction tube; and a nozzle provided at an end part of the gas supply pipe on a reaction tube side and formed with foamed quartz. It further includes a mass flow controller connected to the gas supply pipe to control a flow rate of the gas, and a first pressure gauge connected to the gas supply pipe between the mass flow controller and the nozzle. |
