发明名称 UNDERCOAT AGENT AND METHOD OF FORMING PATTERN OF LAYER COMPRISING BLOCK COPOLYMER
摘要 A undercoat agent used for performing phase separation of a layer formed on a substrate and containing a block copolymer having a plurality of blocks bonded, wherein the undercoat agent contains a resin component, the resin component is formed from a structural unit having an aromatic ring and a structural unit not having an aromatic ring, and the resin component has a group that can interact with the substrate, and also has a 3 to 7-membered, ether-containing cyclic group.
申请公布号 US2013252179(A1) 申请公布日期 2013.09.26
申请号 US201313786007 申请日期 2013.03.05
申请人 TOKYO OHKA KOGYO CO., LTD. 发明人 SENZAKI TAKAHIRO;MIYAGI KEN;MIYASHITA KENICHIRO
分类号 C09D133/14 主分类号 C09D133/14
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