发明名称 EXCIMER LAMP
摘要 PROBLEM TO BE SOLVED: To greatly improve a starting aid effect and to provide a structure for performing reliable starting aid at any positions of the rotation direction of a lamp, in an excimer lamp including a double cylindrical discharge container comprising an inner tube and an outer tube, an inner electrode provided on an outer surface of the inner tube, an outer electrode provided on an outer surface of the outer tube, and a starting aid body arranged in a discharge space and coming into contact with both in inner surface of the inner tube and an inner surface of the outer tube.SOLUTION: The starting aid body includes a conductive fixing part provided on the inner surface of the inner tube, and a conductive movable body connected to the fixing part, and an area on which the movable body is brought into contact with the outer tube is smaller than an area on which the fixing part is brought into contact with the inner tube.
申请公布号 JP2013191399(A) 申请公布日期 2013.09.26
申请号 JP20120056638 申请日期 2012.03.14
申请人 USHIO INC 发明人 SATO KENICHI
分类号 H01J65/00;H01J61/54 主分类号 H01J65/00
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