发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 According to an embodiment, a semiconductor device includes a plurality of first semiconductor regions that extend in a first direction and are arranged in a direction intersecting the first direction, and each element separation region that is provided between the plurality of first semiconductor regions. The element separation region includes a first element separation portion that is formed to a first depth from an upper surface of the first semiconductor region and a second element separation portion that is formed from the first depth to a second depth more than the first depth and electrically insulates between adjacent elements.
申请公布号 US2013248978(A1) 申请公布日期 2013.09.26
申请号 US201313837246 申请日期 2013.03.15
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SAKAGUCHI TAKESHI;ARAI FUMITAKA
分类号 H01L27/11 主分类号 H01L27/11
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