| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric device which prevents peeling of an electrode formed by electroless plating, and to provide a manufacturing method of the piezoelectric device.SOLUTION: A piezoelectric device (100) includes: a piezoelectric vibration piece (130) including a vibration part where an excitation electrode (131) is formed and an extraction electrode (132); a base plate (120) where a connection electrode (123) on which the piezoelectric vibration piece is placed and electrically connected with the extraction electrode is formed on one main surface and mounting terminals (124a, 124b) are formed on the other main surface; and a lid plate (110). At least a part of the mounting terminals is formed by a first metal film (151) where multiple metal layers are laminated by sputtering or vacuum deposition, a second metal film (152) where multiple metal layers are laminated in a manner similar to the first metal film, formed so as to cover the first metal film or formed in a part of a surface of the first metal film, and having an area different from that of the first metal film, and an electroless plating film (153) formed on at least a surface of the second metal film by electroless plating. |
