| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect inspection device capable of accurately detecting a defect of an inspection object.SOLUTION: A defect inspection device includes: an illumination optical system for illuminating an inspection object; an imaging optical system for forming multiple optical images of the same part of the inspection object, provided with light path dividing means for dividing light emitted from the illumination optical system and passing through or reflected by the inspection object into multiple light paths; conversion means for converting each of the multiple optical images into pieces of image data; particular part detection means for detecting a particular part with respect to the surrounding in each piece of the image data; light path length adjustment means for making the light path lengths of the multiple light paths to an imaging surface of the conversion means different from one another; and defect determination means for determining the particular part as a defect when the particular part detection means detects the particular part in one of the multiple pieces of the image data. |
