发明名称 METHOD FOR SELECTIVELY ETCHING METAL
摘要 PROBLEM TO BE SOLVED: To provide a method by which not only titanium but also other metals are selectively etched more preferentially than a ground base material, at a practicable speed.SOLUTION: This method for selectively etching a metal selected from titanium and niobium, an oxide of the metal or an alloy of these metals, provided on a ground base material, is characterized by bringing the metal selected from titanium and niobium, the oxide of the metal or the alloy layer of these metals into contact with an alkaline etching solution including at least one of ethanol amines, selected from diethanol amine, triethanol amine and 2,2',2'',2'''-ethylenedinitrilotetraethanol.
申请公布号 JP2013189686(A) 申请公布日期 2013.09.26
申请号 JP20120057213 申请日期 2012.03.14
申请人 JCU CORP 发明人 CORDONIER CHRISTOPHER;NABESHIMA MITSUHIRO;KUMAGAI SHINGO;TAKAHASHI NAOKI
分类号 C23F1/40 主分类号 C23F1/40
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