发明名称 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 A memory cell array including a plurality of memory cell units arrayed in a matrix configuration along a first direction and a second direction which is perpendicular direction to the first direction, each memory cell unit including a plurality of memory cell transistors, a first select gate transistor and a second select gate transistor, word lines extending to the first direction, and a first insulating film formed on an upper surface of the memory cell array, a first embedded wiring layer embedded in the first embedded wiring layer, the first embedded wiring layer including a wiring portion commonly connected to a source region of each first select gate transistor, wherein the first embedded wiring layer has an inclined pattern which extends in a direction not parallel to either of the first and the second directions.
申请公布号 US2013248963(A1) 申请公布日期 2013.09.26
申请号 US201313784621 申请日期 2013.03.04
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 TAKEKIDA HIDETO
分类号 H01L27/105 主分类号 H01L27/105
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