| 摘要 |
PROBLEM TO BE SOLVED: To provide a gyro sensor capable of detecting an angular velocity around each axis of three axes intersecting with one another.SOLUTION: A gyro element 2 has a base portion 41 and a vibration section 4 comprising: first and second detection vibration arms 421 and 422 extending to one side from the base portion 41 in directions inclined with respect to both axes of an X-axis and a Y-axis; third and fourth detection vibration arms 423 and 424 extending to the other side from the base portion 41 in directions inclined with respect to both the axes of the X-axis and the Y-axis; fifth and sixth detection vibration arms 425 and 426 extending to both sides from the base portion 41 in a Y-axis direction; first and second coupling arms 44 and 45 extending to both the sides from the base portion 41 in an X-axis direction; first and second drive vibration arms 46 and 47 extending to both the sides from a leading end of the first coupling arm 44 in the Y-axis direction; and third and fourth drive vibration arms 48 and 49 extending to both the sides from a leading end of the second coupling arm 45 in the Y-axis direction. |
