发明名称 SENSOR ELEMENT, SENSOR DEVICE AND ELECTRONIC APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a sensor element having excellent detection sensitivity, and a sensor device and an electronic apparatus which include the sensor element and are excellent in reliability.SOLUTION: A sensor element 2 includes: a base part 21; a detecting vibration arm 23 extended from the base part 21; and detection parts 41 and 42 which are provided in the detecting vibration arm 23 for detecting a flexural vibration of the detecting vibration arm 23. The detection parts 41 and 42 include: first electrode layers; second electrode layers provided on an opposite side to the detecting vibration arm 23 for the first electrode layers; and piezoelectric layers provided between the first electrode layer and the second electrode layer. The detection parts 41 and 42 include parts 414 and 424 provided so as to straddle a boundary part between the detecting vibration arm 23 and the base part 21, and the parts 414 and 424 are bent or curved so as to extend in a direction including a direction component orthogonal to an extension direction of the detecting vibration arm 23 along the detecting vibration arm 23 and a side surface of the base part 21.
申请公布号 JP2013190303(A) 申请公布日期 2013.09.26
申请号 JP20120056457 申请日期 2012.03.13
申请人 SEIKO EPSON CORP 发明人 ASARI TOMOTAKA
分类号 G01C19/5628;H01L41/08;H01L41/09;H01L41/18;H01L41/187 主分类号 G01C19/5628
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