| 摘要 |
PROBLEM TO BE SOLVED: To inspect performance of a piezoelectric actuator by using a resonance frequency without enlarging an apparatus.SOLUTION: In a flow path unit 21, inspection spaces 17 are provided at adjacent positions of a plurality of pressure chambers 10 in a scanning direction respectively. In a piezoelectric actuator 22, the part that overlaps with the pressure chamber 10, and the part that overlaps with the inspection space 17 become a drive part 22a and an inspection part 22b respectively. An individual electrode 45 of the drive part 22a and an inspection electrode 46 of the inspection part 22b are continued through a conduction part 47. An inspection electrode 46 is applied voltage and the frequency is changed by contacting a probe 63 connected with a voltage applying device 62 to the individual electrode 45. Then, the frequency when the peak of current value Ie is obtained is detected from a value V of the applied voltage and a current value Ie output from a common electrode 44 detected by a current detecting device 61 as a resonance frequency of the inspection part 22b. |
