发明名称 Quantum Efficiency Back Side Illuminated CMOS Image Sensor And Package, And Method Of Making Same
摘要 An image sensor device (and method of making same) that includes a substrate with front and back opposing surfaces, a plurality of photo detectors formed at the front surface, and a plurality of contact pads formed at the front surface which are electrically coupled to the photo detectors. A plurality of cavities are formed into a back surface of the substrate such that each cavity is disposed over one of the photo detectors. Absorption compensation material having light absorption characteristics that differ from those of the substrate is disposed in the cavities. A plurality of color filters are each disposed over one of the photo detectors. The plurality of photo detectors are configured to produce electronic signals in response to light incident through the color filters.
申请公布号 US2013249031(A1) 申请公布日期 2013.09.26
申请号 US201213427604 申请日期 2012.03.22
申请人 OGANESIAN VAGE 发明人 OGANESIAN VAGE
分类号 H01L27/146 主分类号 H01L27/146
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