RECORDING MEDIUM, IMPRINT METHOD, AND IMPRINT APPARATUS

摘要

According to an embodiment, a non-transitory computer readable recording medium that records a dropping position setting program is provided. The dropping position setting program causes a computer to execute extracting a large pattern region whose pattern size is larger than a preset reference value from a template pattern used for imprinting and setting a first dropping position within a predetermined range from a position of the large pattern region and a second dropping position in a region other than the first dropping position as a dropping position of resist to be dropped in an imprint shot on a processing target substrate.