| 摘要 |
The invention relates to a method for implantation of atomic or ionic species into a batch of substrates made of semiconductor material, in which: - each substrate made of semiconductor material is positioned on a respective support of a batch implanter, each substrate comprising a thin layer of electrical insulator on its surface, and - a dose of at least one ionic or atomic species is implanted over the whole surface of the said substrates, through their layer of insulator, so as to form a fragilization region within each substrate and to bound there a thin layer of semiconductor material between the thin layer of insulator and the fragilization region of the substrate, the implantation method being characterized in that, during the said method, each support on which a substrate is positioned has at least two separate inclinations with respect to the plane orthogonal to the direction of implantation of the species, in order to improve the implantation depth of the species in the substrate. The invention also relates to structures of the semiconductor-on-insulator type obtained by the implementation of the implantation method. |
