DEVICE FOR PRODUCING ALUMINUM NITRIDE CRYSTAL GRAINS, METHOD FOR PRODUCING ALUMINUM NITRIDE CRYSTAL GRAINS, AND ALUMINUM NITRIDE CRYSTAL GRAINS

摘要

PROBLEM TO BE SOLVED: To provide a device for producing aluminum nitride crystal grains, which can efficiently produces single crystal aluminum nitride crystal grains, a method for producing aluminum nitride crystal grains using the production device and aluminum nitride crystal grains produced by the production method.SOLUTION: A device for producing aluminum nitride crystal grains incudes: a first reaction chamber 7a for generating aluminum chloride gas by reacting hydrogen chloride gas and aluminum heated to a temperature that is the melting point of the aluminum or lower; a second reaction chamber 2a for growing aluminum nitride crystal grains by reacting ammonia gas and the aluminum chloride gas; a heater 3 for heating the first reaction chamber 7a and the second reaction chamber 2a; and a shroud 9 for separating the ammonia gas and the aluminum chloride gas up to the second reaction chamber 2a.