| 摘要 |
PROBLEM TO BE SOLVED: To easily, accurately and uniformly apply a coating liquid on a substrate having warpage and unevenness.SOLUTION: By holding a bar 109 by two or more chucks 110 and providing a pressurizing means corresponding to each chuck 110, pressurization can be performed while locally regulating pressurization loading of each chuck 110 by the pressurizing means so that a coating liquid can be easily, accurately and uniformly applied on a substrate with warpage and unevenness. |
