| 摘要 |
PROBLEM TO BE SOLVED: To provide an inkjet head capable of suppressing the deterioration in a parylene film due to oxygen, and capable of excellently maintaining electric insulation between ink and electrode for a long time.SOLUTION: An inkjet head 1 includes: a pressure chamber 31 to which ink is supplied; a nozzle 13 in communication with the pressure chamber 31 and for ejecting the ink; and an electrode 32 arranged in the pressure chamber 31, to which driving voltage for deforming the pressure chamber 31 to apply pressure on the ink is impressed. A parylene film 38 and a barrier film 39 are provided on the electrode 32. The parylene film 38 covers the electrode 32 to protect the electrode 32 from the ink. The barrier film 39 is deposited on the parylene film 38 to isolate the parylene film 38 from oxygen. |
