发明名称 PRESSURE SENSOR
摘要 A pressure sensor includes a detecting circuit configured to detect the difference between outputs from a first pressure variation sensor and a second pressure variation sensor. The first pressure variation sensor and the second pressure variation sensor have the same distance of a gap, and have frequency characteristics different from each other, that is, cutoff frequencies different from each other by setting the value of a capacity of the cavity of the first pressure variation sensor to be larger than the value of a capacity of the cavity of the second pressure variation sensor.
申请公布号 US2013247677(A1) 申请公布日期 2013.09.26
申请号 US201313779863 申请日期 2013.02.28
申请人 SEIKO INSTRUMENTS INC. 发明人 UCHIYAMA TAKESHI;SHINOGI MASATAKA
分类号 G01L13/02 主分类号 G01L13/02
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