| 摘要 |
PROBLEM TO BE SOLVED: To provide a reversing device which can reverse a substrate without scratching or damaging the substrate.SOLUTION: A reversing device comprises: first movable support bodies 26 which are driven in an approaching and separating direction; first support members 31 which are provided on opposing surfaces of the first movable support bodies 26, and support both end parts of one face of a substrate W by tip parts; second movable support bodies 27 which are arranged in such a state as not to interfere with the first movable support bodies 26, and are driven in the approaching and separating direction; second support members 32 which are provided on opposing surfaces of the second movable support bodies 27, and in which the tip parts face both end parts of the other face of the substrate W of which both end parts of one face are supported by the first support members 31 when the second movable support bodies 27 are driven in the approaching direction; and a plurality of fall-off prevention members 36 which move in a direction approaching the outer peripheral surface of the substrate W and prevent the substrate W from moving and deviating, when the substrate W supported by the first support members is reversed and is supported by the second support members. |
