| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a membrane probe which includes a sheet on which a bump is formed and a ring which is fixed to the sheet, and in which the sheet has neither wrinkles nor slack.SOLUTION: A method for manufacturing a membrane probe includes a ring fixation step of fixing a ring 4 to a sheet body 2', and a bump formation step of forming a bump on the sheet body 2'. The ring fixation step has: a first fixation step of fixing the sheet body 2' onto a base 40; an expansion step of expanding the sheet body 2' fixed onto the base 40 by heating the base 40 by heating means 50 to be expanded; and a second fixation step of fixing the ring 4 onto the sheet body 2'. |
