发明名称 EXPOSURE HEAD AND EXPOSURE DEVICE
摘要 This exposure head is configured so as to include: a transparent substrate; exposure light sources which are formed on the transparent substrate and which radiate exposure light; light collecting lenses for collecting the exposure light, which is emitted from the exposure light sources, on an object to be exposed; an image capturing means which is disposed on the opposite side of the transparent substrate from the light collecting lenses and which captures an image of the object to be exposed; and a control means which controls the lighting of the exposure light sources on the basis of information relating to the image captured by the image capturing means. This exposure device is configured so as to include the exposure head according to the present invention. As a result of these configurations, the accuracy of positioning of the object to be exposed is improved and the accuracy of exposure of the object to be exposed is improved.
申请公布号 WO2013140499(A1) 申请公布日期 2013.09.26
申请号 WO2012JP57024 申请日期 2012.03.19
申请人 V TECHNOLOGY CO., LTD.;KAJIYAMA, KOICHI;MIZUMURA, MICHINOBU 发明人 KAJIYAMA, KOICHI;MIZUMURA, MICHINOBU
分类号 G03F7/20;H01L21/027 主分类号 G03F7/20
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