发明名称 OPTICAL SYSTEM AND METHOD OF USE
摘要 A method for improving imaging properties of an optical system and an optical system of this type having improved imaging properties are described. The optical system can have a plurality of optical elements. In some embodiments, an optical element is positioned and/or deformed by mechanical force action and by thermal action. In certain embodiments, one optical element is positioned and/or deformed by mechanical force action and another optical element is deformed by thermal action.
申请公布号 US2013250261(A1) 申请公布日期 2013.09.26
申请号 US201313893322 申请日期 2013.05.13
申请人 CARL ZEISS SMT GMBH 发明人 CONRADI OLAF
分类号 G03F7/20 主分类号 G03F7/20
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