| 摘要 |
A magnifying imaging optical unit (7) has at most four mirrors (M1 to M4), which, via an imaging beam path (8) having imaging partial rays (25, 19, 20) between the mirrors (M1 to M4) that are adjacent in the imaging beam path (8), image an object field (6) in an object plane (11) into an image field (9) in an image plane (12). The optical unit (7) is designed a first imaging partial ray (19) such that between a second mirror (M2) in the imaging beam path (8) and a third mirror (M3) in the imaging beam path (8) and a second imaging partial ray (20) between the third mirror (M3) in the imaging beam path (8) and a fourth mirror (M4) in the imaging beam path (8) respectively pass through at least one passage opening (21) in a mirror body (22) of a first mirror (M1) in the imaging beam path (8). According to a further aspect, the optical unit has a structural length T that is at most 1300 mm, and a ratio T/beta of the structural length T and an imaging scale beta that is less than 1.5. This results in an imaging optical unit that takes account of increased requirements made of the compactness and the transmission of the imaging optical unit, particularly for a given imaging scale.
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