| 摘要 |
<p>One embodiment relates to a pillar-supported array of micro electron lenses. The micro-lens array includes a base layer (110) on a substrate, the base layer including an array of base electrode pads (202) and an insulating border (204) surrounding the base electrode pads so as to electrically isolate the base electrode pads from each other. The micro-lens array further includes an array of lens holes (130) aligned with the array of base electrode pads and one or more stacked electrode layers (for example, 111, 112, 113, and 114) having openings aligned with the array of lens holes. The micro-lens array further includes one or more layers of insulating pillars (for example, 121, 122, 123, and 124), each layer of insulating pillars supporting a stacked electrode layer. Another embodiment relates to a method of fabricating a pillar-supported array of micro electron lenses. Other embodiments, aspects and features are also disclosed.</p> |
