| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a ceramic sintered body, in which a pH value of an aqueous grinding liquid is controlled to a specified range, and which hardly causes an operating failure etc. of each component of a manufacturing device. <P>SOLUTION: This manufacturing method of the ceramic sintered body uses a set of the following components: a grinding liquid tank 22 in which the aqueous grinding liquid is reserved, a processing machine 24 which processes necessary spots of the ceramic sintered body using the aqueous grinding liquid, a waste liquid recovery tank 32 in which the used aqueous grinding liquid (waste liquid 30) is recovered and reserved, a second pump 34 which recovers the waste liquid 30 from the processing machine 24 and feeds the recovered waste liquid 30 to the waste liquid recovery tank 32, and filter equipment 38 which filters the waste liquid (recovered liquid 36) from the waste liquid recovery tank 32, and feeds again the recycled aqueous grinding liquid 26 to the grinding liquid tank 22. In addition, a carbon dioxide gas feeder facility 42 are installed and a mixer 44 is connected with a channel between the second pump 34 and the waste liquid recovery tank 32, so that the carbon dioxide gas 46 is supplied to the waste liquid 30 and fed out to the waste liquid recovery tank 32 from the processing machine 24. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
