发明名称 APPARATUS FOR ROTATING GLASS SUBSTRATE
摘要 <p>PURPOSE: An apparatus for rotating a glass substrate is provided to stably load or unload the glass substrate by preventing interference on a fork of a transfer robot. CONSTITUTION: A flip body (120) rotates around a rotary shaft (113) which is horizontally located in a chamber (110). A gateway (111) is formed on one side of the chamber to horizontally input and output a glass substrate (10). A first holder (140) vertically faces a second holder (150) on the inner side of the flip body. A plurality of first lift driving units (160) and a plurality of second lift driving units (170) are formed on the upper surface and the lower surface of the flip body respectively. The first lift driving units and the second lift driving units are fixed on the upper surface and the lower surface of the flip body to be arranged in a vertical direction and a horizontal direction.</p>
申请公布号 KR20130104139(A) 申请公布日期 2013.09.25
申请号 KR20120025359 申请日期 2012.03.13
申请人 JU ATTS 发明人 JEONG, JIN HWANG;NO, TAE WOO;JO, JAE HYUN;LEE, SEUNG JUN;PARK, SANG WOO;LEE, CHEONG MYONG;SHIN, YOUN CHUL
分类号 H01L51/56;B65G49/00;H01L21/677 主分类号 H01L51/56
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