| 摘要 |
<p>PURPOSE: A correction jig device is provided to prevent the position of a manipulator from being changed in a distance measuring process by obtaining the distance of the manipulator and the distance of a wafer without contact. CONSTITUTION: A tray (111) is regularly formed on a cassette. The tray forms two walls to be narrower than a wafer (191,193). A distance measuring unit (130) measures a distance from the wafer and a distance from a manipulator (180) which receives the wafer on the tray. The distance measuring unit measures a reference distance from the wafer which is received on the tray. The distance measuring unit generates the position information of the manipulator by using the reference distance and the distance from the manipulator.</p> |
