THE THIN FILM AND METHOD FOR MANUFACTURING THIN FILM CONTAINING FLUORINE
摘要
PURPOSE: A method for manufacturing thin films including fluorine and the thin films are provided to improve corrosion and wear resistance by controlling property of the thin films. CONSTITUTION: A method for manicuring thin films including fluorine comprises following steps. A surface of a material (10) in a chamber is activated, and pre-processed by inputting reaction gas for removing foreign matters left. A middle layer (20) is coated on the surface of the material by injecting the reaction gas including Si in order to stick to the inner part of the chamber. A DLC layer (30) of the middle layer is coated by injecting hydrocarbon gas into the chamber. A fluorine layer (40) is coated on the DLC layer by injecting fluorination gas in order to improve corrosion and wear resistance of the chamber.
申请公布号
KR20130104646(A)
申请公布日期
2013.09.25
申请号
KR20120026308
申请日期
2012.03.14
申请人
KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY;CHO, YOUNG SANG
发明人
MOON, KYOUNG IL;KIM, JUN HYUNG;PARK, HYUN JUN;CHOI, YOON;LEE, JAE SEUNG