| 摘要 |
PURPOSE: A vibration probe system and a micro structure measuring method using the same are provided to measure a three-dimensional micro shape or micro lens and a piece which is not able to be detected by a three-dimensional shape measurement device. CONSTITUTION: A stylus(210) attached to a flexible structure(220) is vibrated through an excitation unit(300). A vibration probe system measures the displacement of the stylus. The amplitude of the stylus is calculated by using the measured displacement. The system generates a signal for controlling a distance between the stylus and a measurement target to maintain the size of the amplitude. |
