发明名称 Uncooled infrared imaging device
摘要 <p>An uncooled infrared imaging device according to an embodiment includes: reference pixels formed on a semiconductor substrate and arranged in at least one row; and infrared detection pixels arranged in the remaining rows and detecting incident infrared rays. Each of the reference pixels includes a first cell located above a first concave portion. The first cell includes a first thermoelectric conversion unit having a first infrared absorption film; and a first thermoelectric conversion element. Each of the infrared detection pixels includes a second cell located above a second concave portion, and having a larger area than the first cell. The second cell includes: a second thermoelectric converting unit located above the second concave portion; and first and second supporting structure units supporting the second thermoelectric converting unit above the second concave portion. The second thermoelectric converting unit includes: a second infrared absorption film; and a second thermoelectric conversion element.</p>
申请公布号 EP2642261(A1) 申请公布日期 2013.09.25
申请号 EP20120199635 申请日期 2012.12.28
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 HONDA, HIROTO;SUZUKI, KAZUHIRO;FUNAKI, HIDEYUKI;ATSUTA, MASAKI;SASAKI, KEITA;ISHII, KOICHI;KWON, HONAM
分类号 G01J5/20;G01J5/22 主分类号 G01J5/20
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