发明名称 |
Actuating apparatus, actuating system and method for actuating a working stage to move relative to a platform with high-precision positioning capability |
摘要 |
<p>An actuating apparatus includes a motion driving module rigidly coupled to a platform, a working stage driven by the motion driving module to move relative to the platform, a speckle image capturing module rigidly coupled to the working stage and capable of capturing a speckle image of a sub-region of a reference region of the platform, and a control module operable in a positioning mode, where the control module obtains a current position of the working stage in a coordinate system associated with the platform based on a comparison between the captured speckle image and reference speckle image information that is associated with and unique to the reference region, and controls the motion driving module to drive the working stage toward a target position in the coordinate system based on a difference between the current position and the target position.</p> |
申请公布号 |
EP2641694(A1) |
申请公布日期 |
2013.09.25 |
申请号 |
EP20120160953 |
申请日期 |
2012.03.23 |
申请人 |
CHUNG-SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY, ARMAMENTS, BUREAU, MINISTRY OF NATIONAL DEFENSE |
发明人 |
HWANG, YI-YUH;HWANG, CHIN-DER;LIAO, CHIH-MING;CHIANG, TING-WEI;CHANG, WEI-GUO;HUANG, WEN-CHENG |
分类号 |
B23Q15/20;B25J9/16;G01B11/00;G01D5/347;G05B19/29;G05B19/31 |
主分类号 |
B23Q15/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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