发明名称 MEMBER FOR MOUNTING AND TEMPERATURE CONTROLLED MOUNTING DEVICE
摘要 <p>Provided is a placement member including: a main body having a placement surface on which a sample is placed; and a plurality of heating units disposed within the main body. The plurality of heating units are individually temperature-controllable. The main body may have a non-placement surface on a side opposite of the placement surface, and the heating units may be disposed closer to the placement surface than to the non-placement surface.</p>
申请公布号 EP2642511(A1) 申请公布日期 2013.09.25
申请号 EP20110840929 申请日期 2011.11.18
申请人 KYOCERA CORPORATION 发明人 HORIUCHI, MASAHIKO
分类号 H01L21/027;G03F7/20;H01L21/67 主分类号 H01L21/027
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