| 摘要 |
<p>PURPOSE: A logistics system of a wafer production line is provided to reduce the size of a clean room by efficiently using the space of the clean room through a high block transfer unit. CONSTITUTION: A first clean room (100) includes a wafer mounting unit (110), a block processing unit (120), a wafer demounting unit (130), and a high block transfer unit (140). The wafer mounting unit mounts a wafer (30) on a block (50). The wafer demounting unit separates the wafer from the block after various processes and receives the wafer on a cassette (10). A second clean room (200) includes a cassette passing unit (210) for inputting the cassette with the wafer. A cassette transfer unit (300) transfers the cassette with the wafer from the first clean room to the second clean room. [Reference numerals] (110) Wafer mounting unit; (120) Block processing unit; (130) Wafer demounting unit; (140) High block transfer unit; (150) Block lot management unit; (210) Cassette passing unit; (300) Cassette transfer unit</p> |
