| 摘要 |
<p>PURPOSE: A recycling method of a graphite-chuck for producing poly-silicon is provided to improve the economical efficiency of the poly-silicon manufacturing process, and to effectively recycle the poly-silicon attached to the graphite-chuck. CONSTITUTION: A recycling method of a graphite-chuck for producing poly-silicon comprises the following steps: separating a graphite-chuck-poly-silicon end in which the poly-silicon is attached to the surface of the graphite-chuck from silicon ingot (S100); and inserting the graphite-chuck-poly-silicon end into a separating solution for reaction (S200). The separating solution is an alkali separating solution, and the reaction is performed while the separating solution is at 60-70°C. The reaction is performed by inserting the separating solution into a capillary tube formed in between the graphite-chuck and the poly-silicon. [Reference numerals] (S100) Separating a graphite-chuck-poly-silicon end; (S200) Making the graphite-chuck-poly-silicon end and a separating solution react; (S300) Processing the surface of the graphite-chuck</p> |
