| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma treatment device capable of applying plasma treatment uniformly on various kinds of objects for treatment. <P>SOLUTION: The plasma treatment device 1, provided with a case 11 with a through-hole 22a formed for an object tube for treatment Z (a treatment object) to penetrate, and a radiator 14 erected from the case 11 and radiating with an input of high-frequency signals S, for generating plasma P in the vicinity of the radiator 14 by radiation of the high-frequency signals S, is further provided with a positioning member 15 fitted to the case 11 in free detachment in a state penetrated into the through-hole 22a, and allowing movement of the object tube for treatment Z along a penetrating direction while regulating movement of the same Z in a contacting and separating direction with and from an inner face of the case 11. <P>COPYRIGHT: (C)2010,JPO&INPIT |
