发明名称 |
PERFORATED CONTACT ELECTRODE ON VERTICAL NANOWIRE ARRAY |
摘要 |
Disclosed herein is a structure having: a support, a plurality of nanowires perpendicular to the support, and an electrode in contact with a first end of each nanowire. Each nanowire has a second end in contact with the support. The electrode contains a plurality of perforations. The electrode contains a plurality of perforations. Also disclosed herein is a method of: providing the above support and nanowires; depositing a layer of a filler material that covers a portion of each nanowire and leaves a first end of each nanowire exposed; depositing a plurality of nanoparticles onto the filler material; depositing an electrode material on the nanoparticles, the ends of the nanowires, and any exposed filler material; and removing the nanoparticles and filler material to form an electrode in contact with the first end of each nanowire; wherein the electrode contains a plurality of perforations. |
申请公布号 |
EP2641272(A1) |
申请公布日期 |
2013.09.25 |
申请号 |
EP20110842108 |
申请日期 |
2011.11.10 |
申请人 |
THE GOVERNMENT OF THE UNITED STATES OF AMERICA ASREPRESENTED BY THE SECRETARY OF THE NAVY |
发明人 |
PEHRSSON, PEHR, E.;FIELD, CHRISTOPHER;IN, HYUN JIN |
分类号 |
H01L29/84;G01R27/26 |
主分类号 |
H01L29/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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