发明名称 |
ION SOURCE AND ION IMPLANTER HAVING THE SAME |
摘要 |
An ion source includes a filament configured to emit thermoelectrons and a cathode having a first side proximate the filament and a second side opposite the first side. The cathode includes a first layer that includes a first material on the first side of the cathode and a second layer on the second side of the cathode. The first layer is between the filament and the second side. The second layer is configured to limit discharge of the first material of the first layer from the ion source when the filament emits themoelectrons to generate ions from the ion source
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申请公布号 |
KR20130104585(A) |
申请公布日期 |
2013.09.25 |
申请号 |
KR20120026202 |
申请日期 |
2012.03.14 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KAMEI SEIJI |
分类号 |
H01J37/08;H01J37/317 |
主分类号 |
H01J37/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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