| 摘要 |
PURPOSE: An LED wafer stacking apparatus is provided to continuously output a wafer in an inline state and to automatically stack and heat the wafer. CONSTITUTION: A cassette supply unit (10) horizontally moves a cassette into which a plurality of wafers are vertically inserted in a width direction. A cassette rotating and erecting unit (20) erects the cassette after the cassette is horizontally rotated at 90 degrees in a longitudinal direction. A wafer stacking unit (30) is installed near the cassette rotating and erecting unit and vertically stacks the wafers. A stacked wafer output unit (40) outputs the wafers which are vertically stacked by the wafer stacking unit. A wafer heating unit (50) heats the stacked wafers. |
