| 摘要 |
PURPOSE: A method for forming a heat radiation coating layer on the back sheet of a photovoltaic power generation module is provided to prevent environmental pollution by using low temperature plasma coating facilities. CONSTITUTION: A vacuum condition is formed in a vacuum chamber (10). A vaporizer (24) vaporizes a supplied precursor (26). The vaporized precursor is supplied into the vacuum chamber. Plasma is generated by applying voltage to the inner electrodes of the vacuum chamber. A heat radiation coating layer is formed on a back sheet (18). |
