HIGH RESOLUTION OBJECT INSPECTION APPARATUS USING TERAHERTZ WAVE

摘要

PURPOSE: A high-resolution object testing device using terahertz waves is provided to focus all terahertz waves supplied to a target object by positioning a focusing lens on a projecting position, thereby improving the performance of testing the target object. CONSTITUTION: A high-resolution object testing device using terahertz waves (1) includes a terahertz wave supply unit (100), a focusing lens (200), a rotary plate (300), and a terahertz wave detecting unit. The terahertz wave supply unit generates terahertz waves and moves a route of the terahertz waves according to time and supplies the terahertz waves to a target object (10). The focusing lens is arranged between the terahertz supply unit and the target object and focuses the terahertz waves supplied by the terahertz wave supply unit. The rotary plate is formed into a plate shape and includes a plurality of focusing lenses having different distances from the center. The rotary plate is rotated in the circumferential direction so that at least one focusing lens is arranged on a progressing route of the terahertz waves. The terahertz wave detecting unit detects the terahertz waves which are incident into the target object. [Reference numerals] (100) Terahertz wave supply unit