PROCESSING METHOD OF PROCESSED OBJECT AND SPLITTING METHOD

摘要

PURPOSE: A method of processing a subject is provided to locally suppress that the subject deteriorates and scatter, and to actively generate the cleavage and dehiscence of a subject in a direction of a process proposed line and a depth direction. CONSTITUTION: A method of processing a subject comprises the following steps of: scanning a subject with a plurality of pulse laser light of the ultra short pulse light that has a pulse width which is the picosecond order from one scanning lens that is located opposed to the subject in an overlapping manner; locating each focal point of the plurality of laser light at the different depth locations in the subject; and forming the start point for separation in the subject by generating the cleavage and dehiscence of the subject according to the direction of process proposed line. [Reference numerals] (AA) Focus position