| 摘要 |
PURPOSE: An optical system and a laser machining apparatus are provided to improve the efficiency of single pulse laser to be used for machining and to control the length of beam through a diffraction optical element. CONSTITUTION: An optical system comprises a light source(11), a diffraction optical element(12), a condensing lens(13), and an anamorphic optical unit. The diffraction optical element receives the light coming out from the light source and divides the incident light into multiple beams. The condensing lens condenses the light divided by the diffraction optical element onto multiple spots according to the division angle. The anamorphic optical unit applies a first action for varying the magnification of the light entering the diffraction optical element into one or more axial directions. The anamorphic optical unit removes the first action from the light coming out from the diffraction optical element and propagating to the condensing lens. |
