发明名称 METHOD OF FABRICATING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
摘要 PURPOSE: A method for fabricating a semiconductor device is provided to improve throughput by using nitride semiconductor. CONSTITUTION: A nitride semiconductor layer is formed on a substrate. A first insulating layer (31) is formed on the nitride semiconductor layer. A second insulating layer (32) is formed on the first insulating layer. A gate electrode (41) is formed on the second insulating layer. A source electrode and a drain electrode are formed on the nitride semiconductor layer. [Reference numerals] (AA) Structure drawing of a semiconductor about a first embodiment
申请公布号 KR20130105283(A) 申请公布日期 2013.09.25
申请号 KR20120154379 申请日期 2012.12.27
申请人 FUJITSU LIMITED 发明人 OZAKI SHIROU
分类号 H01L21/336;H01L29/778 主分类号 H01L21/336
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